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100 1 _ |a Smirnov, V.
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245 _ _ |a Doped microcrystalline silicon oxide alloys for silicon-based photovoltaics: Optoelectronic properties, chemical composition, and structure studied by advanced characterization techniques
260 _ _ |a Weinheim
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520 _ _ |a Doped microcrystalline silicon oxide (μc-SiOx:H) alloys attract significant attention as a functional material in photovoltaic devices. By using various advanced characterization methods, we have studied the relationship between optoelectronic properties, chemical composition, and structure of p-type µc-SiOx:H deposited by plasma enhanced chemical vapor deposition (PECVD). For a wide range of compositions with varying oxygen content, we show that the dominant components are Si and a-SiO2, while the fraction of suboxides is minor. The μc-SiOx:H material with sufficient oxygen content (x = 0.35) exhibits an enlarged optical gap E04 > 2.2 eV and sufficiently high dark conductivity >10−6 S cm−1; the crystalline silicon fraction has a filament-like shape (with a typical width of around 10 nm) forming a branch-like structure elongated in the growth direction over several hundreds of nanometers
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700 1 _ |a Lambertz, Andreas
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700 1 _ |a Moll, Sandra
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700 1 _ |a Bär, M.
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700 1 _ |a Starr, D. E.
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700 1 _ |a Wilks, R. G.
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700 1 _ |a Gorgoi, M.
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700 1 _ |a Heidt, Anna
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700 1 _ |a Luysberg, Martina
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700 1 _ |a Holländer, Bernhard
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700 1 _ |a Finger, Friedhelm
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773 _ _ |a 10.1002/pssa.201533022
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