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@ARTICLE{Guenduez:811656,
      author       = {Guenduez, Deniz and Tankut, Aydin and Sedani, Salar and
                      Karaman, Mehmet and Turan, Rasit},
      title        = {{C}rystallization and phase separation mechanism of silicon
                      oxide thin films fabricated via e-beam evaporation of
                      silicon monoxide},
      journal      = {Physica status solidi / C},
      volume       = {12},
      number       = {9-11},
      issn         = {1862-6351},
      address      = {Berlin},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2016-04046},
      pages        = {1229 - 1235},
      year         = {2015},
      abstract     = {In this work, silicon oxide thin films were synthesizedvia
                      e-beam evaporation of silicon monoxide. Subsequentannealing
                      experiments were carried out to induce Sinanocrystals (Si
                      NCs) formation. A broad range of annealingdurations and
                      temperatures were studied. Ramanspectroscopy, X-ray
                      photoelectron spectroscopy (XPS)and Fourier Transform
                      Infrared Spectroscopy (FTIR)were employed to study the
                      mechanism of phase separationin silicon oxide films and
                      crystallization of Si.Raman spectroscopy results show that
                      SiO cannot beconsidered as a composite mixture of Si and
                      SiO2. Resultssuggest that phase separation and
                      crystallization aretwo separate processes even at relatively
                      high temperatures.Amorphous Si formation was observed at
                      annealingtemperatures as low as 800 ◦C. A minimum
                      annealingtemperature of between 800 and 900 ◦C is
                      requiredto form Si NCs. XPS results show a strong phase
                      separationat annealing temperature of 1100 ◦C.},
      cin          = {IEK-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-9-20110218},
      pnm          = {131 - Electrochemical Storage (POF3-131) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF3-131 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000372057300008},
      doi          = {10.1002/pssc.201510114},
      url          = {https://juser.fz-juelich.de/record/811656},
}