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@INPROCEEDINGS{Zhang:821158,
      author       = {Zhang, Haitao and Duchaine, Julian and Torregrosa, Frank
                      and Liu, Linjie and Hollander, Bernd and Breuer, Uwe and
                      Mantl, Siegfried and Zhao, Qing-Tai},
      title        = {{I}mproved {N}i{S}i contacts on {S}i by {CF}4 plasma
                      immersion ion implantation for 14nm node {MOSFET}s},
      publisher    = {IEEE},
      reportid     = {FZJ-2016-06396},
      isbn         = {978-1-4673-7356-2},
      pages        = {187-189},
      year         = {2015},
      abstract     = {We present in this paper high quality thin NiSi contacts on
                      Si for the 16nm node using pre-silicidation CF4 Plasma
                      Immersion Ion Implantation (PIII) The thermal stability, the
                      layer uniformity and the interface roughness of thin NiSi
                      layers are improved by CF4 PIII, which is assumed to be
                      caused by segregation of C, F atoms at the grain boundaries
                      and at the NiSi/Si interface. The Schottky barrier height of
                      NiSi/p-Si is also lowered by CF4 plasma, thus a lower
                      contact resistance on p+ doped Si is expected.},
      date          = {5182015},
      organization  = {2015 IEEE International Interconnect
                       Technology Conference and 2015 IEEE
                       Materials for Advanced Metallization
                       Conference (IITC/MAM), Grenoble
                       (France), 18 May 2015 - 21 May 2015},
      cin          = {PGI-9 / ZEA-3},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)ZEA-3-20090406},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.1109/IITC-MAM.2015.7325616},
      url          = {https://juser.fz-juelich.de/record/821158},
}