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@ARTICLE{Lee:824450,
author = {Lee, Woongkyu and Yoo, Sijung and Yoon, Kyung Jean and Yeu,
In Won and Chang, Hye Jung and Choi, Jung-Hae and
Hoffmann-Eifert, Susanne and Waser, R. and Hwang, Cheol
Seong},
title = {{R}esistance switching behavior of atomic layer deposited
{S}r{T}i{O}$_{3}$ film through possible formation of
{S}r$_{2}${T}i$_{6}${O}$_{13}$ or
{S}r$_{1}${T}i$_{11}${O}$_{20}$ phases},
journal = {Scientific reports},
volume = {6},
issn = {2045-2322},
address = {London},
publisher = {Nature Publishing Group},
reportid = {FZJ-2016-07039},
pages = {20550 -},
year = {2016},
abstract = {Identification of microstructural evolution of nanoscale
conducting phase, such as conducting filament (CF), in many
resistance switching (RS) devices is a crucial factor to
unambiguously understand the electrical behaviours of the
RS-based electronic devices. Among the diverse RS material
systems, oxide-based redox system comprises the major
category of these intriguing electronic devices, where the
local, along both lateral and vertical directions of thin
films, changes in oxygen chemistry has been suggested to be
the main RS mechanism. However, there are systems which
involve distinctive crystallographic phases as CF; the
Magnéli phase in TiO2 is one of the very well-known
examples. The current research reports the possible presence
of distinctive local conducting phase in atomic layer
deposited SrTiO3 RS thin film. The conducting phase was
identified through extensive transmission electron
microscopy studies, which indicated that oxygen-deficient
Sr2Ti6O13 or Sr1Ti11O20 phase was presumably present mainly
along the grain boundaries of SrTiO3 after the unipolar set
switching in Pt/TiN/SrTiO3/Pt structure. A detailed
electrical characterization revealed that the samples showed
typical bipolar and complementary RS after the memory cell
was unipolar reset.},
cin = {PGI-7},
ddc = {000},
cid = {I:(DE-Juel1)PGI-7-20110106},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000369146300001},
doi = {10.1038/srep20550},
url = {https://juser.fz-juelich.de/record/824450},
}