TY  - PAT
AU  - Faley, Michael
TI  - Sputtering sources for high-pressure sputtering with large targets and sputtering method
M1  - FZJ-2016-07272
SN  - US9481928B2
PY  - 2016
LB  - PUB:(DE-HGF)23
IS  - 13/876,648
UR  - https://juser.fz-juelich.de/record/824714
ER  -