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Sputtering sources for high-pressure sputtering with large targets and sputtering method



2016

Patent No.: US9481928B2; 13/876,648

Contributing Institute(s):
  1. Mikrostrukturforschung (PGI-5)
Research Program(s):
  1. 144 - Controlling Collective States (POF3-144) (POF3-144)

Appears in the scientific report 2016
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The record appears in these collections:
Institute Collections > ER-C > ER-C-1
Institute Collections > PGI > PGI-5
Document types > Patents > Patents
Workflow collections > Public records
Publications database
 Record created 2016-12-08, last modified 2024-06-10
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