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@TECHREPORT{Faley:824714,
      author       = {Faley, Michael},
      title        = {{S}puttering sources for high-pressure sputtering with
                      large targets and sputtering method},
      reportid     = {FZJ-2016-07272},
      year         = {2016},
      cin          = {PGI-5},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {144 - Controlling Collective States (POF3-144)},
      pid          = {G:(DE-HGF)POF3-144},
      typ          = {PUB:(DE-HGF)23},
      url          = {https://juser.fz-juelich.de/record/824714},
}