%0 Conference Paper
%A Schulte-Braucks, Christian
%A Pandey, R.
%A Barth, M.
%A von den Driesch, Nils
%A Sharma, P.
%A Rayner, B.
%A Mantl, Siegfried
%A Buca, Dan Mihai
%A Datta, S.
%T Scaled tri-layer gate oxide for GeSn nanoelectronics
%M FZJ-2017-00087
%D 2016
%B 2016 Semiconductor Interface Specialists Conference (SISC)
%C 7 Dec 2016 - 10 Dec 2016, San Diego (USA)
Y2 7 Dec 2016 - 10 Dec 2016
M2 San Diego, USA
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/825782