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@ARTICLE{Wen:826428,
      author       = {Wen, Jiao and Liu, Qiang and Liu, Chang and Wang, Yize and
                      Zhang, Bo and Xue, Zhongying and Di, Zengfeng and Min,
                      Jiahua and Yu, Wenjie and Liu, Xinke and Wang, Xi and Zhao,
                      Qing-Tai},
      title        = {{I}on-sensitive field-effect transistor with
                      s{S}i/{S}i0.5{G}e0.5/s{SOI} quantum-well for high voltage
                      sensitivity},
      journal      = {Microelectronic engineering},
      volume       = {163},
      issn         = {0167-9317},
      address      = {[S.l.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2017-00653},
      pages        = {115 - 118},
      year         = {2016},
      abstract     = {An ion-sensitive field-effect transistor (ISFET) with
                      improved sensing current and voltage sensitivity is realized
                      by using a sSi/Si0.5Ge0.5/sSOI quantum-well (QW)
                      heterostructure and an Al2O3 dielectric layer as sensing
                      membrane coupling with the back-gate. The voltage
                      sensitivity is much higher than the reference SOI ISFET,
                      typically at low drain current due to the high hole mobility
                      confined in the SiGe QW. A high voltage sensitivity 360
                      mV/pH with a linearity of $99.89\%$ was achieved for QW
                      ISFET. The results of the planar QW ISFET show great
                      potential for low cost, real-time monitoring of
                      bio-chemicals due to its simplified process.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000381837300017},
      doi          = {10.1016/j.mee.2016.06.017},
      url          = {https://juser.fz-juelich.de/record/826428},
}