Contribution to a book

FZJ-2017-00692

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Chemical Vapour Deposition Techniques

Hoffmann-Eifert, S. (Corresponding author)FZJ*

2016
Forschungszentrum Jülich
ISBN: 978-3-95806-091-3

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Contributing Institute(s):

1. Elektronische Materialien (PGI-7)
2. JARA Institut Green IT (PGI-10)

Research Program(s):

1. 524 - Controlling Collective States (POF3-524) (POF3-524)

Appears in the scientific report 2016

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Database coverage:
No Authors Fulltext

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