TY  - JOUR
AU  - Fischione, Paul E.
AU  - Williams, Robert E. A.
AU  - Genç, Arda
AU  - Fraser, Hamish L.
AU  - Dunin-Borkowski, Rafal
AU  - Luysberg, Martina
AU  - Bonifacio, Cecile S.
AU  - Kovács, András
TI  - A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation
JO  - Microscopy and microanalysis
VL  - 23
IS  - 04
SN  - 1435-8115
CY  - New York, NY
PB  - Cambridge University Press
M1  - FZJ-2017-06619
SP  - 782 - 793
PY  - 2017
AB  - This paper reports on the substantial improvement of specimen quality by use of a low voltage (0.05 to ~1 keV), small diameter (~1 μm), argon ion beam following initial preparation using conventional broad-beam ion milling or focused ion beam. The specimens show significant reductions in the amorphous layer thickness and implanted artifacts. The targeted ion milling controls the specimen thickness according to the needs of advanced aberration-corrected and/or analytical transmission electron microscopy applications.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000407563800010
DO  - DOI:10.1017/S1431927617000514
UR  - https://juser.fz-juelich.de/record/837842
ER  -