Journal Article

FZJ-2017-06619

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png A Small Spot, Inert Gas, Ion Milling Process as a Complementary Technique to Focused Ion Beam Specimen Preparation

Fischione, P. E. (Corresponding author) ; Williams, R. E. A. ; Genç, A. ; Fraser, H. L. ; Dunin-Borkowski, R.FZJ* ; Luysberg, M.FZJ* ; Bonifacio, C. S. ; Kovács, A.FZJ*

2017
Cambridge University Press New York, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/19357  doi:10.1017/S1431927617000514

Abstract: This paper reports on the substantial improvement of specimen quality by use of a low voltage (0.05 to ~1 keV), small diameter (~1 μm), argon ion beam following initial preparation using conventional broad-beam ion milling or focused ion beam. The specimens show significant reductions in the amorphous layer thickness and implanted artifacts. The targeted ion milling controls the specimen thickness according to the needs of advanced aberration-corrected and/or analytical transmission electron microscopy applications.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)
2. Mikrostrukturforschung (PGI-5)

Research Program(s):

1. 143 - Controlling Configuration-Based Phenomena (POF3-143) (POF3-143)

Appears in the scientific report 2017

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Database coverage:
; ; ; Allianz-Lizenz / DFG ; BIOSIS Previews ; Current Contents - Life Sciences ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; NCBI Molecular Biology Database ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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