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@ARTICLE{Fischione:837842,
      author       = {Fischione, Paul E. and Williams, Robert E. A. and Genç,
                      Arda and Fraser, Hamish L. and Dunin-Borkowski, Rafal and
                      Luysberg, Martina and Bonifacio, Cecile S. and Kovács,
                      András},
      title        = {{A} {S}mall {S}pot, {I}nert {G}as, {I}on {M}illing
                      {P}rocess as a {C}omplementary {T}echnique to {F}ocused
                      {I}on {B}eam {S}pecimen {P}reparation},
      journal      = {Microscopy and microanalysis},
      volume       = {23},
      number       = {04},
      issn         = {1435-8115},
      address      = {New York, NY},
      publisher    = {Cambridge University Press},
      reportid     = {FZJ-2017-06619},
      pages        = {782 - 793},
      year         = {2017},
      abstract     = {This paper reports on the substantial improvement of
                      specimen quality by use of a low voltage (0.05 to ~1 keV),
                      small diameter (~1 μm), argon ion beam following initial
                      preparation using conventional broad-beam ion milling or
                      focused ion beam. The specimens show significant reductions
                      in the amorphous layer thickness and implanted artifacts.
                      The targeted ion milling controls the specimen thickness
                      according to the needs of advanced aberration-corrected
                      and/or analytical transmission electron microscopy
                      applications.},
      cin          = {ER-C-1 / PGI-5},
      ddc          = {570},
      cid          = {I:(DE-Juel1)ER-C-1-20170209 / I:(DE-Juel1)PGI-5-20110106},
      pnm          = {143 - Controlling Configuration-Based Phenomena (POF3-143)},
      pid          = {G:(DE-HGF)POF3-143},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000407563800010},
      doi          = {10.1017/S1431927617000514},
      url          = {https://juser.fz-juelich.de/record/837842},
}