Journal Article

FZJ-2017-07285

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Angular and velocity distributions of tungsten sputtered by low energy argon ions

Marenkov, E. (Corresponding author) ; Nordlund, K. ; Sorokin, I. ; Eksaeva, A.FZJ* ; Gutorov, K. ; Jussila, J. ; Granberg, F. ; Borodin, D.FZJ*

2017
Elsevier Science Amsterdam [u.a.]

This record in other databases:    

Please use a persistent id in citations: doi:10.1016/j.jnucmat.2017.09.021

Abstract: Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85–200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking into account random crystallographic surface orientation is developed, and applied for the case under consideration. The simulations approximate experimental results well. At low energies the distributions acquire “butterfly-like” shape with lower sputtering yields for close to normal angles comparing to the cosine distribution. The energy distributions of sputtered particles were simulated. The Thompson distribution remains valid down to near-threshold 85 eV case.

---

Contributing Institute(s):

1. Plasmaphysik (IEK-4)

Research Program(s):

1. 174 - Plasma-Wall-Interaction (POF3-174) (POF3-174)
2. HITEC - Helmholtz Interdisciplinary Doctoral Training in Energy and Climate Research (HITEC) (HITEC-20170406) (HITEC-20170406)

Appears in the scientific report 2017

---

Database coverage:
Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

---