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@ARTICLE{Marenkov:838725,
author = {Marenkov, E. and Nordlund, K. and Sorokin, I. and Eksaeva,
A. and Gutorov, K. and Jussila, J. and Granberg, F. and
Borodin, D.},
title = {{A}ngular and velocity distributions of tungsten sputtered
by low energy argon ions},
journal = {Journal of nuclear materials},
volume = {496},
issn = {0022-3115},
address = {Amsterdam [u.a.]},
publisher = {Elsevier Science},
reportid = {FZJ-2017-07285},
pages = {18 - 23},
year = {2017},
abstract = {Sputtering by ions with low near-threshold energies is
investigated. Experiments and simulations are conducted for
tungsten sputtering by low-energy, 85–200 eV Ar atoms. The
angular distributions of sputtered particles are measured. A
new method for molecular dynamics simulation of sputtering
taking into account random crystallographic surface
orientation is developed, and applied for the case under
consideration. The simulations approximate experimental
results well. At low energies the distributions acquire
“butterfly-like” shape with lower sputtering yields for
close to normal angles comparing to the cosine distribution.
The energy distributions of sputtered particles were
simulated. The Thompson distribution remains valid down to
near-threshold 85 eV case.},
cin = {IEK-4},
ddc = {530},
cid = {I:(DE-Juel1)IEK-4-20101013},
pnm = {174 - Plasma-Wall-Interaction (POF3-174) / HITEC -
Helmholtz Interdisciplinary Doctoral Training in Energy and
Climate Research (HITEC) (HITEC-20170406)},
pid = {G:(DE-HGF)POF3-174 / G:(DE-Juel1)HITEC-20170406},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000414205500003},
doi = {10.1016/j.jnucmat.2017.09.021},
url = {https://juser.fz-juelich.de/record/838725},
}