TY  - JOUR
AU  - Duchamp, Martial
AU  - Girard, Olivier
AU  - Pozzi, Giulio
AU  - Soltner, Helmut
AU  - Winkler, Florian
AU  - Speen, Rolf
AU  - Cooper, David
AU  - Dunin-Borkowski, Rafal
TI  - Fine electron biprism on a Si-on-insulator chip for off-axis electron holography
JO  - Ultramicroscopy
VL  - 185
SN  - 0304-3991
CY  - Amsterdam
PB  - Elsevier Science
M1  - FZJ-2017-07956
SP  - 81-89
PY  - 2018
AB  - Off-axis electron holography allows both the amplitude and the phase shift of an electron wavefield propagating through a specimen in a transmission electron microscope to be recovered. The technique requires the use of an electron biprism to deflect an object wave and a reference wave to form an interference pattern. Here, we introduce an approach based on semiconductor processing technology to fabricate fine electron biprisms with rectangular cross-sections. By performing electrostatic calculations and preliminary experiments, we demonstrate that such biprisms promise improved performance for electron holography experiments.
LB  - PUB:(DE-HGF)16
C6  - pmid:29223803
UR  - <Go to ISI:>//WOS:000423963900012
DO  - DOI:10.1016/j.ultramic.2017.11.012
UR  - https://juser.fz-juelich.de/record/840439
ER  -