Journal Article FZJ-2017-07956

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Fine electron biprism on a Si-on-insulator chip for off-axis electron holography

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2018
Elsevier Science Amsterdam

Ultramicroscopy 185, 81-89 () [10.1016/j.ultramic.2017.11.012]

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Abstract: Off-axis electron holography allows both the amplitude and the phase shift of an electron wavefield propagating through a specimen in a transmission electron microscope to be recovered. The technique requires the use of an electron biprism to deflect an object wave and a reference wave to form an interference pattern. Here, we introduce an approach based on semiconductor processing technology to fabricate fine electron biprisms with rectangular cross-sections. By performing electrostatic calculations and preliminary experiments, we demonstrate that such biprisms promise improved performance for electron holography experiments.

Classification:

Contributing Institute(s):
  1. Physik Nanoskaliger Systeme (ER-C-1)
  2. Zentralinstitut für Technologie (ZEA-1)
Research Program(s):
  1. 899 - ohne Topic (POF3-899) (POF3-899)

Appears in the scientific report 2018
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Medline ; Creative Commons Attribution-NonCommercial-NoDerivs CC BY-NC-ND 4.0 ; OpenAccess ; BIOSIS Previews ; Current Contents - Life Sciences ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; NCBI Molecular Biology Database ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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 Record created 2017-12-04, last modified 2025-07-01