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000862095 1001_ $$0P:(DE-Juel1)136674$$aTran, Duy$$b0
000862095 245__ $$aCMOS-Compatible Silicon Nanowire Field-Effect Transistor Biosensor: Technology Development toward Commercialization
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000862095 520__ $$aOwing to their two-dimensional confinements, silicon nanowires display remarkable optical, magnetic, and electronic properties. Of special interest has been the development of advanced biosensing approaches based on the field effect associated with silicon nanowires (SiNWs). Recent advancements in top-down fabrication technologies have paved the way to large scale production of high density and quality arrays of SiNW field effect transistor (FETs), a critical step towards their integration in real-life biosensing applications. A key requirement toward the fulfilment of SiNW FETs’ promises in the bioanalytical field is their efficient integration within functional devices. Aiming to provide a comprehensive roadmap for the development of SiNW FET based sensing platforms, we critically review and discuss the key design and fabrication aspects relevant to their development and integration within complementary metal-oxide-semiconductor (CMOS) technology
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000862095 7001_ $$0P:(DE-HGF)0$$aPham, Thuy$$b1
000862095 7001_ $$0P:(DE-Juel1)128745$$aWolfrum, Bernhard$$b2
000862095 7001_ $$0P:(DE-Juel1)128713$$aOffenhäusser, Andreas$$b3
000862095 7001_ $$0P:(DE-HGF)0$$aThierry, Benjamin$$b4$$eCorresponding author
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