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@ARTICLE{Tran:862095,
      author       = {Tran, Duy and Pham, Thuy and Wolfrum, Bernhard and
                      Offenhäusser, Andreas and Thierry, Benjamin},
      title        = {{CMOS}-{C}ompatible {S}ilicon {N}anowire {F}ield-{E}ffect
                      {T}ransistor {B}iosensor: {T}echnology {D}evelopment toward
                      {C}ommercialization},
      journal      = {Materials},
      volume       = {11},
      number       = {5},
      issn         = {1996-1944},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {FZJ-2019-02451},
      pages        = {785 -},
      year         = {2018},
      abstract     = {Owing to their two-dimensional confinements, silicon
                      nanowires display remarkable optical, magnetic, and
                      electronic properties. Of special interest has been the
                      development of advanced biosensing approaches based on the
                      field effect associated with silicon nanowires (SiNWs).
                      Recent advancements in top-down fabrication technologies
                      have paved the way to large scale production of high density
                      and quality arrays of SiNW field effect transistor (FETs), a
                      critical step towards their integration in real-life
                      biosensing applications. A key requirement toward the
                      fulfilment of SiNW FETs’ promises in the bioanalytical
                      field is their efficient integration within functional
                      devices. Aiming to provide a comprehensive roadmap for the
                      development of SiNW FET based sensing platforms, we
                      critically review and discuss the key design and fabrication
                      aspects relevant to their development and integration within
                      complementary metal-oxide-semiconductor (CMOS) technology},
      cin          = {ICS-8},
      ddc          = {600},
      cid          = {I:(DE-Juel1)ICS-8-20110106},
      pnm          = {523 - Controlling Configuration-Based Phenomena (POF3-523)},
      pid          = {G:(DE-HGF)POF3-523},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:29751688},
      UT           = {WOS:000434711700135},
      doi          = {10.3390/ma11050785},
      url          = {https://juser.fz-juelich.de/record/862095},
}