%0 Journal Article %A Achenbach, Jan-Ole %A Mráz, Stanislav %A Primetzhofer, Daniel %A Schneider, Jochen %T Correlative Experimental and Theoretical Investigation of the Angle-Resolved Composition Evolution of Thin Films Sputtered from a Compound Mo2BC Target %J Coatings %V 9 %N 3 %@ 2079-6412 %C Basel %I MDPI %M FZJ-2019-04049 %P 206 - %D 2019 %F PUB:(DE-HGF)16 %9 Journal Article %R 10.3390/coatings9030206 %U https://juser.fz-juelich.de/record/864211