TY  - JOUR
AU  - Achenbach, Jan-Ole
AU  - Mráz, Stanislav
AU  - Primetzhofer, Daniel
AU  - Schneider, Jochen
TI  - Correlative Experimental and Theoretical Investigation of the Angle-Resolved Composition Evolution of Thin Films Sputtered from a Compound Mo2BC Target
JO  - Coatings
VL  - 9
IS  - 3
SN  - 2079-6412
CY  - Basel
PB  - MDPI
M1  - FZJ-2019-04049
SP  - 206 -
PY  - 2019
LB  - PUB:(DE-HGF)16
DO  - DOI:10.3390/coatings9030206
UR  - https://juser.fz-juelich.de/record/864211
ER  -