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@ARTICLE{Achenbach:864211,
      author       = {Achenbach, Jan-Ole and Mráz, Stanislav and Primetzhofer,
                      Daniel and Schneider, Jochen},
      title        = {{C}orrelative {E}xperimental and {T}heoretical
                      {I}nvestigation of the {A}ngle-{R}esolved {C}omposition
                      {E}volution of {T}hin {F}ilms {S}puttered from a {C}ompound
                      {M}o2{BC} {T}arget},
      journal      = {Coatings},
      volume       = {9},
      number       = {3},
      issn         = {2079-6412},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {FZJ-2019-04049},
      pages        = {206 -},
      year         = {2019},
      ddc          = {660},
      pnm          = {QUANTUM MECHANICALLY GUIDED MATERIALS DESIGN
                      $(jara0131_20151101)$},
      pid          = {$G:(DE-Juel1)jara0131_20151101$},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.3390/coatings9030206},
      url          = {https://juser.fz-juelich.de/record/864211},
}