%0 Journal Article
%A Liu, Sida
%A Chang, Keke
%A Mráz, Stanislav
%A Chen, Xiang
%A Hans, Marcus
%A Music, Denis
%A Primetzhofer, Daniel
%A Schneider, Jochen M.
%T Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films
%J Acta materialia
%V 165
%@ 1359-6454
%C Amsterdam [u.a.]
%I Elsevier Science85412
%M FZJ-2019-04058
%P 615 - 625
%D 2019
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1016/j.actamat.2018.12.004
%U https://juser.fz-juelich.de/record/864220