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@ARTICLE{Liu:864220,
      author       = {Liu, Sida and Chang, Keke and Mráz, Stanislav and Chen,
                      Xiang and Hans, Marcus and Music, Denis and Primetzhofer,
                      Daniel and Schneider, Jochen M.},
      title        = {{M}odeling of metastable phase formation for sputtered
                      {T}i1-x{A}lx{N} thin films},
      journal      = {Acta materialia},
      volume       = {165},
      issn         = {1359-6454},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science85412},
      reportid     = {FZJ-2019-04058},
      pages        = {615 - 625},
      year         = {2019},
      ddc          = {670},
      pnm          = {QUANTUM MECHANICALLY GUIDED MATERIALS DESIGN
                      $(jara0131_20151101)$},
      pid          = {$G:(DE-Juel1)jara0131_20151101$},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1016/j.actamat.2018.12.004},
      url          = {https://juser.fz-juelich.de/record/864220},
}