%0 Journal Article
%A Pomaska, Manuel
%A Köhler, Malte
%A Procel Moya, Paul
%A Zamchiy, Alexandr
%A Singh, Aryak
%A Kim, Do Yun
%A Isabella, Olindo
%A Zeman, Miro
%A Li, Shenghao
%A Qiu, Kaifu
%A Eberst, Alexander
%A Smirnov, Vladimir
%A Finger, Friedhelm
%A Rau, Uwe
%A Ding, Kaining
%T Transparent silicon carbide/tunnel SiO$_{2}$ passivation for c‐Si solar cell front side: Enabling J$_{sc}$ > 42 mA/cm 2 and i V$_{oc}$ of 742 mV
%J Progress in photovoltaics
%V 28
%N 4
%@ 1099-159X
%C Chichester
%I Wiley
%M FZJ-2020-00302
%P 321 - 327
%D 2020
%X N‐type microcrystalline silicon carbide (μc‐SiC:H(n)) is a wide bandgap material that is very promising for the use on the front side of crystalline silicon (c‐Si) solar cells. It offers a high optical transparency and a suitable refractive index that reduces parasitic absorption and reflection losses, respectively. In this work, we investigate the potential of hot wire chemical vapor deposition (HWCVD)–grown μc‐SiC:H(n) for c‐Si solar cells with interdigitated back contacts (IBC). We demonstrate outstanding passivation quality of μc‐SiC:H(n) on tunnel oxide (SiO2)–passivated c‐Si with an implied open‐circuit voltage of 742 mV and a saturation current density of 3.6 fA/cm2. This excellent passivation quality is achieved directly after the HWCVD deposition of μc‐SiC:H(n) at 250°C heater temperature without any further treatments like recrystallization or hydrogenation. Additionally, we developed magnesium fluoride (MgF2)/silicon nitride (SiNx:H)/silicon carbide antireflection coatings that reduce optical losses on the front side to only 0.47 mA/cm2 with MgF2/SiNx:H/μc‐SiC:H(n) and 0.62 mA/cm2 with MgF2/μc‐SiC:H(n). Finally, calculations with Sentaurus TCAD simulation using MgF2/μc‐SiC:H(n)/SiO2/c‐Si as front side layer stack in an IBC solar cell reveal a short‐circuit current density of 42.2 mA/cm2, an open‐circuit voltage of 738 mV, a fill factor of 85.2% and a maximum power conversion efficiency of 26.6%.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000507529600001
%R 10.1002/pip.3244
%U https://juser.fz-juelich.de/record/872832