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@ARTICLE{Deuter:878701,
      author       = {Deuter, Valerie and Grochowicz, Maciej and Brose, Sascha
                      and Biller, Jan and Danylyuk, Serhiy and Taubner, Thomas and
                      Siemion, Agnieszka and Grützmacher, Detlev and Juschkin,
                      Larissa},
      title        = {{C}omputational proximity lithography with extreme
                      ultraviolet radiation},
      journal      = {Optics express},
      volume       = {28},
      number       = {18},
      issn         = {1094-4087},
      address      = {Washington, DC},
      publisher    = {Soc.},
      reportid     = {FZJ-2020-03019},
      pages        = {27000 -},
      year         = {2020},
      abstract     = {The potential of extreme ultraviolet (EUV) computational
                      proximity lithography for fabrication of arbitrary nanoscale
                      patterns is investigated. We propose to use a holographic
                      mask (attenuating phase shifting mask) consisting of
                      structures of two phase levels. This approach allows
                      printing of arbitrary, non-periodic structures without using
                      high-resolution imaging optics. The holographic mask is
                      designed for a wavelength of 13.5 nm with a conventional
                      high-resolution electron beam resist as the phase shifting
                      medium (pixel size 50 nm). The imaging performance is
                      evaluated by using EUV radiation with different degrees of
                      spatial coherence. Therefore exposures on identical masks
                      are carried out with both undulator radiation at a
                      synchrotron facility and plasma-based radiation at a
                      laboratory setup.},
      cin          = {PGI-10 / PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-10-20170113 / I:(DE-Juel1)PGI-9-20110106 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {523 - Controlling Configuration-Based Phenomena (POF3-523)},
      pid          = {G:(DE-HGF)POF3-523},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:32906962},
      UT           = {WOS:000565713200110},
      doi          = {10.1364/OE.398805},
      url          = {https://juser.fz-juelich.de/record/878701},
}