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000885155 1001_ $$0P:(DE-HGF)0$$aPanning, Eric M.$$b0$$eEditor
000885155 1112_ $$aSPIE Advanced Lithography$$cSan Jose$$wCalifornia
000885155 245__ $$aEnabling laboratory EUV research with a compact exposure tool
000885155 260__ $$aBellingham, Wash.$$bSPIE$$c2016
000885155 300__ $$a97760R
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000885155 4900_ $$0PERI:(DE-600)2398361-9$$aProceedings of SPIE$$v9776$$x0277-786X
000885155 536__ $$0G:(DE-HGF)POF3-521$$a521 - Controlling Electron Charge-Based Phenomena (POF3-521)$$cPOF3-521$$fPOF III$$x0
000885155 7001_ $$0P:(DE-HGF)0$$aGoldberg, Kenneth A.$$b1$$eEditor
000885155 7001_ $$0P:(DE-HGF)0$$aBrose, Sascha$$b2$$eCorresponding author
000885155 7001_ $$0P:(DE-HGF)0$$aDanylyuk, Serhiy$$b3
000885155 7001_ $$0P:(DE-HGF)0$$aTempeler, Jenny$$b4
000885155 7001_ $$0P:(DE-HGF)0$$aKim, Hyun-su$$b5
000885155 7001_ $$0P:(DE-HGF)0$$aLoosen, Peter$$b6
000885155 7001_ $$0P:(DE-Juel1)157957$$aJuschkin, Larissa$$b7
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