Contribution to a conference proceedings/Contribution to a book

FZJ-2020-03559

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Enabling laboratory EUV research with a compact exposure tool

Panning, E. M. (Editor)RWTH* ; Goldberg, K. A. (Editor)RWTH* ; Brose, S. (Corresponding author)RWTH* ; Danylyuk, S.RWTH* ; Tempeler, J.RWTH*FZJ* ; Kim, H.-s.FZJ*RWTH* ; Loosen, P. ; Juschkin, L.FZJ*RWTH*

2016
SPIE Bellingham, Wash.

This record in other databases:  

Please use a persistent id in citations: doi:10.1117/12.2219164

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2016

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Database coverage:
; Allianz-Lizenz / DFG

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