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001     885155
005     20210130010242.0
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037 _ _ |a FZJ-2020-03559
082 _ _ |a 620
100 1 _ |a Panning, Eric M.
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111 2 _ |a SPIE Advanced Lithography
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245 _ _ |a Enabling laboratory EUV research with a compact exposure tool
260 _ _ |a Bellingham, Wash.
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700 1 _ |a Goldberg, Kenneth A.
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700 1 _ |a Brose, Sascha
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700 1 _ |a Danylyuk, Serhiy
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700 1 _ |a Tempeler, Jenny
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700 1 _ |a Kim, Hyun-su
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700 1 _ |a Loosen, Peter
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700 1 _ |a Juschkin, Larissa
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