Contribution to a book FZJ-2020-03659

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Rare-Earth Metal Scandate High-k Layers

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2006
Electrochemical Society (ECS) Pennington, NJ

Pennington, NJ : Electrochemical Society (ECS), ECS transactions 1, 161 - 175 () [10.1149/1.2209266]

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Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
  2. Center of Nanoelectronic Systems for Information Technology (CNI)
Research Program(s):
  1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2006
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 Record created 2020-10-02, last modified 2020-10-03



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