000885255 001__ 885255 000885255 005__ 20201003142516.0 000885255 0247_ $$2DOI$$a10.1149/1.2209266 000885255 0247_ $$2ISSN$$a1938-5862 000885255 037__ $$aFZJ-2020-03659 000885255 041__ $$aeng 000885255 082__ $$a540 000885255 1001_ $$0P:(DE-HGF)0$$aZhao, C.$$b0 000885255 245__ $$aRare-Earth Metal Scandate High-k Layers 000885255 260__ $$aPennington, NJ$$bElectrochemical Society (ECS)$$c2006 000885255 300__ $$a161 - 175 000885255 3367_ $$2ORCID$$aBOOK_CHAPTER 000885255 3367_ $$07$$2EndNote$$aBook Section 000885255 3367_ $$2DRIVER$$abookPart 000885255 3367_ $$2BibTeX$$aINBOOK 000885255 3367_ $$2DataCite$$aOutput Types/Book chapter 000885255 3367_ $$0PUB:(DE-HGF)7$$2PUB:(DE-HGF)$$aContribution to a book$$bcontb$$mcontb$$s53184 000885255 4900_ $$0PERI:(DE-600)2251888-5$$aECS transactions$$v1$$x1938-5862 000885255 500__ $$aRecord converted from VDB: 12.11.2012 000885255 536__ $$0G:(DE-Juel1)FUEK412$$2G:(DE-HGF)$$aGrundlagen für zukünftige Informationstechnologien$$cP42$$x0 000885255 7001_ $$0P:(DE-Juel1)VDB39744$$aHeeg, T.$$b1$$uFZJ 000885255 7001_ $$0P:(DE-Juel1)VDB1732$$aWagner, M.$$b2$$uFZJ 000885255 7001_ $$0P:(DE-Juel1)128631$$aSchubert, J.$$b3$$uFZJ 000885255 7001_ $$0P:(DE-HGF)0$$aWitters, T.$$b4 000885255 7001_ $$0P:(DE-HGF)0$$aBrijs, B.$$b5 000885255 7001_ $$0P:(DE-HGF)0$$aBender, H.$$b6 000885255 7001_ $$0P:(DE-HGF)0$$aRichard, O.$$b7 000885255 7001_ $$0P:(DE-HGF)0$$aAfanas'ev, V. V.$$b8 000885255 7001_ $$0P:(DE-HGF)0$$aHoussa, M.$$b9 000885255 7001_ $$0P:(DE-HGF)0$$aCaymax, M.$$b10 000885255 7001_ $$0P:(DE-HGF)0$$aDe Gendt, S.$$b11 000885255 909CO $$ooai:juser.fz-juelich.de:885255$$pVDB 000885255 9131_ $$0G:(DE-Juel1)FUEK412$$bSchlüsseltechnologien$$kP42$$lGrundlagen für zukünftige Informationstechnologien (FIT)$$vGrundlagen für zukünftige Informationstechnologien$$x0 000885255 9141_ $$y2006 000885255 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer review 000885255 9201_ $$0I:(DE-Juel1)VDB41$$d31.12.2006$$gISG$$kISG-1$$lInstitut für Halbleiterschichten und Bauelemente$$x0 000885255 9201_ $$0I:(DE-Juel1)VDB381$$d14.09.2008$$gCNI$$kCNI$$lCenter of Nanoelectronic Systems for Information Technology$$x1$$z381 000885255 980__ $$acontb 000885255 980__ $$aVDB 000885255 980__ $$aI:(DE-Juel1)VDB41 000885255 980__ $$aI:(DE-Juel1)VDB381 000885255 980__ $$aUNRESTRICTED