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From thin relaxed SiGe buffer layers to Strained Silicon directly on Oxide
Mantl, S.FZJ* ; Buca, D.FZJ* ; Holländer, B.FZJ* ; Lenk, S.FZJ* ; Hueging, N.FZJ* ; Luysberg, M.FZJ* ; Carius, R.FZJ* ; Loo, R. ; Caymax, M. ; Schäfer, H. ; Radu, I. ; Reiche, M. ; Christiansen, S. H. ; Gösele, U.
2006
Electrochemical Society (ECS)
Pennington, NJ
Pennington, NJ : Electrochemical Society (ECS), ECS transactions 3, 1047 - 1055 (2006)2006
Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
- Institut für Halbleiterschichten und Bauelemente (ISG-1)
- Center of Nanoelectronic Systems for Information Technology (CNI)
Research Program(s):
- Grundlagen für zukünftige Informationstechnologien (P42)
Appears in the scientific report
2006