Contribution to a book FZJ-2020-03720

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Tuning the Performance of Pt/HfO2/Ti/Pt ReRAM Devices Obtained from Plasma-Enhanced Atomic Layer Deposition for HfO2 Thin Films

 ;  ;

2016
Pennington, NJ

Pennington, NJ, ECS transactions 75, 177 - 184 () [10.1149/07506.0177ecst]

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Contributing Institute(s):
  1. Elektronische Materialien (PGI-7)
  2. JARA Institut Green IT (PGI-10)
  3. Agrosphäre (IBG-3)
  4. JARA-FIT (JARA-FIT)
Research Program(s):
  1. 524 - Controlling Collective States (POF3-524) (POF3-524)

Appears in the scientific report 2016
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Medline ; No Authors Fulltext ; SCOPUS
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Document types > Books > Contribution to a book
JARA > JARA > JARA-JARA\-FIT
Institute Collections > PGI > PGI-10
Institute Collections > IBG > IBG-3
Institute Collections > PGI > PGI-7
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Publications database

 Record created 2020-10-02, last modified 2021-01-30


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