TY  - JOUR
AU  - Yuan, Yu
AU  - MacArthur, Katherine E.
AU  - Collins, Sean M.
AU  - Brodusch, Nicolas
AU  - Voisard, Frédéric
AU  - Dunin-Borkowski, Rafal E.
AU  - Gauvin, Raynald
TI  - Extraction of 3D quantitative maps using EDS-STEM tomography and HAADF-EDS bimodal tomography
JO  - Ultramicroscopy
VL  - 220
SN  - 0304-3991
CY  - Amsterdam
PB  - Elsevier Science
M1  - FZJ-2020-04399
SP  - 113166 -
PY  - 2020
AB  - Electron tomography has been widely applied to three-dimensional (3D) morphology characterization and chemical analysis at the nanoscale. A HAADF-EDS bimodal tomographic (HEBT) reconstruction technique has been developed to extract high resolution element-specific information. However, the reconstructed elemental maps cannot be directly converted to quantitative compositional information. In this work, we propose a quantification approach for obtaining elemental weight fraction maps from the HEBT reconstruction technique using the physical parameters extracted from a Monte Carlo code, MC X-ray. A similar quantification approach is proposed for the EDS-STEM tomographic reconstruction. The performance of the two quantitative reconstruction methods, using the simultaneous iterative reconstruction technique, are evaluated and compared for a simulated dataset of a two-dimensional phantom sample. The effects of the reconstruction parameters including the number of iterations and the weight of the HAADF signal are discussed. Finally, the two approaches are applied to an experimental dataset to show the 3D structure and quantitative elemental maps of a particle of flux melted metal-organic framework glass.
LB  - PUB:(DE-HGF)16
C6  - 33227698
UR  - <Go to ISI:>//WOS:000600307200002
DO  - DOI:10.1016/j.ultramic.2020.113166
UR  - https://juser.fz-juelich.de/record/887742
ER  -