Journal Article

FZJ-2020-04399

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Extraction of 3D quantitative maps using EDS-STEM tomography and HAADF-EDS bimodal tomography

Yuan, Y. ; MacArthur, K. E. (Corresponding author)FZJ* ; Collins, S. M. ; Brodusch, N. ; Voisard, F. ; Dunin-Borkowski, R. E.FZJ* ; Gauvin, R. (Corresponding author)

2020
Elsevier Science Amsterdam

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Please use a persistent id in citations: http://hdl.handle.net/2128/26559  doi:10.1016/j.ultramic.2020.113166

Abstract: Electron tomography has been widely applied to three-dimensional (3D) morphology characterization and chemical analysis at the nanoscale. A HAADF-EDS bimodal tomographic (HEBT) reconstruction technique has been developed to extract high resolution element-specific information. However, the reconstructed elemental maps cannot be directly converted to quantitative compositional information. In this work, we propose a quantification approach for obtaining elemental weight fraction maps from the HEBT reconstruction technique using the physical parameters extracted from a Monte Carlo code, MC X-ray. A similar quantification approach is proposed for the EDS-STEM tomographic reconstruction. The performance of the two quantitative reconstruction methods, using the simultaneous iterative reconstruction technique, are evaluated and compared for a simulated dataset of a two-dimensional phantom sample. The effects of the reconstruction parameters including the number of iterations and the weight of the HAADF signal are discussed. Finally, the two approaches are applied to an experimental dataset to show the 3D structure and quantitative elemental maps of a particle of flux melted metal-organic framework glass.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)

Research Program(s):

1. 143 - Controlling Configuration-Based Phenomena (POF3-143) (POF3-143)
2. DFG project 257727131 - Nanoskalige Pt Legierungselektrokatalysatoren mit definierter Morphologie: Synthese, Electrochemische Analyse, und ex-situ/in-situ Transmissionselektronenmikroskopische (TEM) Studien (257727131) (257727131)

Appears in the scientific report 2020

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