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@ARTICLE{Yuan:887742,
author = {Yuan, Yu and MacArthur, Katherine E. and Collins, Sean M.
and Brodusch, Nicolas and Voisard, Frédéric and
Dunin-Borkowski, Rafal E. and Gauvin, Raynald},
title = {{E}xtraction of 3{D} quantitative maps using {EDS}-{STEM}
tomography and {HAADF}-{EDS} bimodal tomography},
journal = {Ultramicroscopy},
volume = {220},
issn = {0304-3991},
address = {Amsterdam},
publisher = {Elsevier Science},
reportid = {FZJ-2020-04399},
pages = {113166 -},
year = {2020},
abstract = {Electron tomography has been widely applied to
three-dimensional (3D) morphology characterization and
chemical analysis at the nanoscale. A HAADF-EDS bimodal
tomographic (HEBT) reconstruction technique has been
developed to extract high resolution element-specific
information. However, the reconstructed elemental maps
cannot be directly converted to quantitative compositional
information. In this work, we propose a quantification
approach for obtaining elemental weight fraction maps from
the HEBT reconstruction technique using the physical
parameters extracted from a Monte Carlo code, MC X-ray. A
similar quantification approach is proposed for the EDS-STEM
tomographic reconstruction. The performance of the two
quantitative reconstruction methods, using the simultaneous
iterative reconstruction technique, are evaluated and
compared for a simulated dataset of a two-dimensional
phantom sample. The effects of the reconstruction parameters
including the number of iterations and the weight of the
HAADF signal are discussed. Finally, the two approaches are
applied to an experimental dataset to show the 3D structure
and quantitative elemental maps of a particle of flux melted
metal-organic framework glass.},
cin = {ER-C-1},
ddc = {570},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {143 - Controlling Configuration-Based Phenomena (POF3-143)
/ DFG project 257727131 - Nanoskalige Pt
Legierungselektrokatalysatoren mit definierter Morphologie:
Synthese, Electrochemische Analyse, und ex-situ/in-situ
Transmissionselektronenmikroskopische (TEM) Studien
(257727131)},
pid = {G:(DE-HGF)POF3-143 / G:(GEPRIS)257727131},
typ = {PUB:(DE-HGF)16},
pubmed = {33227698},
UT = {WOS:000600307200002},
doi = {10.1016/j.ultramic.2020.113166},
url = {https://juser.fz-juelich.de/record/887742},
}