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024 7 _ |a 10.1016/j.ultramic.2020.113166
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100 1 _ |a Yuan, Yu
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245 _ _ |a Extraction of 3D quantitative maps using EDS-STEM tomography and HAADF-EDS bimodal tomography
260 _ _ |a Amsterdam
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520 _ _ |a Electron tomography has been widely applied to three-dimensional (3D) morphology characterization and chemical analysis at the nanoscale. A HAADF-EDS bimodal tomographic (HEBT) reconstruction technique has been developed to extract high resolution element-specific information. However, the reconstructed elemental maps cannot be directly converted to quantitative compositional information. In this work, we propose a quantification approach for obtaining elemental weight fraction maps from the HEBT reconstruction technique using the physical parameters extracted from a Monte Carlo code, MC X-ray. A similar quantification approach is proposed for the EDS-STEM tomographic reconstruction. The performance of the two quantitative reconstruction methods, using the simultaneous iterative reconstruction technique, are evaluated and compared for a simulated dataset of a two-dimensional phantom sample. The effects of the reconstruction parameters including the number of iterations and the weight of the HAADF signal are discussed. Finally, the two approaches are applied to an experimental dataset to show the 3D structure and quantitative elemental maps of a particle of flux melted metal-organic framework glass.
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536 _ _ |a DFG project 257727131 - Nanoskalige Pt Legierungselektrokatalysatoren mit definierter Morphologie: Synthese, Electrochemische Analyse, und ex-situ/in-situ Transmissionselektronenmikroskopische (TEM) Studien (257727131)
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700 1 _ |a MacArthur, Katherine E.
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700 1 _ |a Collins, Sean M.
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700 1 _ |a Brodusch, Nicolas
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700 1 _ |a Voisard, Frédéric
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700 1 _ |a Dunin-Borkowski, Rafal E.
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700 1 _ |a Gauvin, Raynald
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773 _ _ |a 10.1016/j.ultramic.2020.113166
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856 4 _ |u https://juser.fz-juelich.de/record/887742/files/1-s2.0-S0304399120303090-main.pdf
856 4 _ |y Published on 2020-11-09. Available in OpenAccess from 2022-11-09.
|u https://juser.fz-juelich.de/record/887742/files/Extraction_of_3D_quantitative_maps.pdf
856 4 _ |y Published on 2020-11-09. Available in OpenAccess from 2022-11-09.
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