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@ARTICLE{Mller:890791,
      author       = {Möller, Sören and Höschen, Daniel and Kurth, Sina and
                      Esser, Gerwin and Hiller, Albert and Scholtysik, Christian
                      and Dellen, Christian and Linsmeier, Christian},
      title        = {{A} {N}ew {H}igh-{T}hroughput {F}ocused {M}e{V}
                      {I}on-{B}eam {A}nalysis {S}etup},
      journal      = {Instruments},
      volume       = {5},
      number       = {1},
      issn         = {2410-390X},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {FZJ-2021-01199},
      pages        = {10 -},
      year         = {2021},
      abstract     = {The analysis of material composition by ion-beam analysis
                      (IBA) is becoming a standard method, similar to electron
                      microscopy. A pool of IBA methods exists, from which the
                      combination of particle-induced-X-ray emission (PIXE),
                      particle induced gamma-ray analysis (PIGE),
                      nuclear-reaction-analysis (NRA), and
                      Rutherford-backscattering-spectrometry (RBS) provides the
                      most complete analysis over the whole periodic table in a
                      single measurement. Yet, for a highly resolved and accurate
                      IBA analysis, a sophisticated technical setup is required
                      integrating the detectors, beam optics, and sample
                      arrangement. A new end-station developed and installed in
                      Forschungszentrum Jülich provides these capabilities in
                      combination with high sample throughput and result accuracy.
                      Mechanical tolerances limit the device accuracy to $3\%$ for
                      RBS. Continuous pumping enables 5*10−8 mbar base pressure
                      with vibration amplitudes < 0.1 µm. The beam optics
                      achieves a demagnification of 24–34, suitable for µ-beam
                      analysis. An in-vacuum manipulator enables scanning 50 × 50
                      mm² sample areas with 10 nm accuracy. The setup features
                      the above-mentioned IBA detectors, enabling a broad range of
                      analysis applications such as the operando analysis of
                      batteries or the post-mortem analysis of plasma-exposed
                      samples with up to 3000 discrete points per day. Custom
                      apertures and energy resolutions down to 11 keV enable
                      separation of Fe and Cr in RBS. This work presents the
                      technical solutions together with the quantification of
                      these challenges and their success in the form of a
                      technical reference.},
      cin          = {IEK-1 / IEK-4 / PGI-9},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-1-20101013 / I:(DE-Juel1)IEK-4-20101013 /
                      I:(DE-Juel1)PGI-9-20110106},
      pnm          = {134 - Plasma-Wand-Wechselwirkung (POF4-134)},
      pid          = {G:(DE-HGF)POF4-134},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.3390/instruments5010010},
      url          = {https://juser.fz-juelich.de/record/890791},
}