%0 Journal Article
%A Yi, Rongxing
%A Zhao, Dongye
%A Oelmann, Jannis
%A Brezinsek, Sebastijan
%A Rasinski, Marcin
%A Mayer, Matej
%A Prakash Dhard, Chandra
%A Naujoks, Dirk
%A Liu, Liwei
%A Qu, Junle
%T 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy
%J Applied surface science
%V 532
%@ 0169-4332
%C Amsterdam
%I Elsevier
%M FZJ-2021-01474
%P 147185 -
%D 2020
%X 3-Dimensional (3D) analysis is crucial for many materials and can be used to study their structure and properties. Laser-Induced Breakdown Spectroscopy (LIBS) is a versatile tool to get depth information quickly, but the poor depth resolution and in general a difficult quantification are the two main drawbacks. To solve these problems, a LIBS method based on picosecond-laser pulses is introduced. The ablation depth is measured and associated with the laser pulse number. A series of layer-structured graphite samples was tested by this method and the 2D and 3D layer structures of these samples were identified with a resolution of up to 24 and 102 nm for Mo and C elements under a residual pressure of 1 × 10−5 Pa, respectively. This shows the great potential of picosecond Laser-Induced Breakdown Spectroscopy (ps-LIBS) in the field of depth analysis.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000574857100003
%R 10.1016/j.apsusc.2020.147185
%U https://juser.fz-juelich.de/record/891385