Journal Article

FZJ-2021-01474

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy

Yi, R. (Corresponding author)FZJ* ; Zhao, D.FZJ* ; Oelmann, J.FZJ* ; Brezinsek, S.FZJ* ; Rasinski, M.FZJ* ; Mayer, M. ; Prakash Dhard, C. ; Naujoks, D. ; Liu, L. ; Qu, J.

2020
Elsevier Amsterdam

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Please use a persistent id in citations: http://hdl.handle.net/2128/27503  doi:10.1016/j.apsusc.2020.147185

Abstract: 3-Dimensional (3D) analysis is crucial for many materials and can be used to study their structure and properties. Laser-Induced Breakdown Spectroscopy (LIBS) is a versatile tool to get depth information quickly, but the poor depth resolution and in general a difficult quantification are the two main drawbacks. To solve these problems, a LIBS method based on picosecond-laser pulses is introduced. The ablation depth is measured and associated with the laser pulse number. A series of layer-structured graphite samples was tested by this method and the 2D and 3D layer structures of these samples were identified with a resolution of up to 24 and 102 nm for Mo and C elements under a residual pressure of 1 × 10−5 Pa, respectively. This shows the great potential of picosecond Laser-Induced Breakdown Spectroscopy (ps-LIBS) in the field of depth analysis.

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Contributing Institute(s):

1. Plasmaphysik (IEK-4)

Research Program(s):

1. 174 - Plasma-Wall-Interaction (POF3-174) (POF3-174)

Appears in the scientific report 2021

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF >= 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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