TY  - JOUR
AU  - Yi, Rongxing
AU  - Zhao, Dongye
AU  - Oelmann, Jannis
AU  - Brezinsek, Sebastijan
AU  - Rasinski, Marcin
AU  - Mayer, Matej
AU  - Prakash Dhard, Chandra
AU  - Naujoks, Dirk
AU  - Liu, Liwei
AU  - Qu, Junle
TI  - 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy
JO  - Applied surface science
VL  - 532
SN  - 0169-4332
CY  - Amsterdam
PB  - Elsevier
M1  - FZJ-2021-01474
SP  - 147185 -
PY  - 2020
AB  - 3-Dimensional (3D) analysis is crucial for many materials and can be used to study their structure and properties. Laser-Induced Breakdown Spectroscopy (LIBS) is a versatile tool to get depth information quickly, but the poor depth resolution and in general a difficult quantification are the two main drawbacks. To solve these problems, a LIBS method based on picosecond-laser pulses is introduced. The ablation depth is measured and associated with the laser pulse number. A series of layer-structured graphite samples was tested by this method and the 2D and 3D layer structures of these samples were identified with a resolution of up to 24 and 102 nm for Mo and C elements under a residual pressure of 1 × 10−5 Pa, respectively. This shows the great potential of picosecond Laser-Induced Breakdown Spectroscopy (ps-LIBS) in the field of depth analysis.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000574857100003
DO  - DOI:10.1016/j.apsusc.2020.147185
UR  - https://juser.fz-juelich.de/record/891385
ER  -