% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Yi:891385,
      author       = {Yi, Rongxing and Zhao, Dongye and Oelmann, Jannis and
                      Brezinsek, Sebastijan and Rasinski, Marcin and Mayer, Matej
                      and Prakash Dhard, Chandra and Naujoks, Dirk and Liu, Liwei
                      and Qu, Junle},
      title        = {3-{D}imensional analysis of layer structured samples with
                      high depth resolution using picosecond laser-induced
                      breakdown spectroscopy},
      journal      = {Applied surface science},
      volume       = {532},
      issn         = {0169-4332},
      address      = {Amsterdam},
      publisher    = {Elsevier},
      reportid     = {FZJ-2021-01474},
      pages        = {147185 -},
      year         = {2020},
      abstract     = {3-Dimensional (3D) analysis is crucial for many materials
                      and can be used to study their structure and properties.
                      Laser-Induced Breakdown Spectroscopy (LIBS) is a versatile
                      tool to get depth information quickly, but the poor depth
                      resolution and in general a difficult quantification are the
                      two main drawbacks. To solve these problems, a LIBS method
                      based on picosecond-laser pulses is introduced. The ablation
                      depth is measured and associated with the laser pulse
                      number. A series of layer-structured graphite samples was
                      tested by this method and the 2D and 3D layer structures of
                      these samples were identified with a resolution of up to 24
                      and 102 nm for Mo and C elements under a residual pressure
                      of 1 × 10−5 Pa, respectively. This shows the great
                      potential of picosecond Laser-Induced Breakdown Spectroscopy
                      (ps-LIBS) in the field of depth analysis.},
      cin          = {IEK-4},
      ddc          = {660},
      cid          = {I:(DE-Juel1)IEK-4-20101013},
      pnm          = {174 - Plasma-Wall-Interaction (POF3-174)},
      pid          = {G:(DE-HGF)POF3-174},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000574857100003},
      doi          = {10.1016/j.apsusc.2020.147185},
      url          = {https://juser.fz-juelich.de/record/891385},
}