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| Hauptseite > Publikationsdatenbank > 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy > print |
| Hauptseite > Publikationsdatenbank > 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy > print |
| 001 | 891385 | ||
| 005 | 20240708133241.0 | ||
| 024 | 7 | _ | |a 10.1016/j.apsusc.2020.147185 |2 doi |
| 024 | 7 | _ | |a 0169-4332 |2 ISSN |
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| 037 | _ | _ | |a FZJ-2021-01474 |
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| 100 | 1 | _ | |a Yi, Rongxing |0 P:(DE-Juel1)177042 |b 0 |e Corresponding author |
| 245 | _ | _ | |a 3-Dimensional analysis of layer structured samples with high depth resolution using picosecond laser-induced breakdown spectroscopy |
| 260 | _ | _ | |a Amsterdam |c 2020 |b Elsevier |
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| 520 | _ | _ | |a 3-Dimensional (3D) analysis is crucial for many materials and can be used to study their structure and properties. Laser-Induced Breakdown Spectroscopy (LIBS) is a versatile tool to get depth information quickly, but the poor depth resolution and in general a difficult quantification are the two main drawbacks. To solve these problems, a LIBS method based on picosecond-laser pulses is introduced. The ablation depth is measured and associated with the laser pulse number. A series of layer-structured graphite samples was tested by this method and the 2D and 3D layer structures of these samples were identified with a resolution of up to 24 and 102 nm for Mo and C elements under a residual pressure of 1 × 10−5 Pa, respectively. This shows the great potential of picosecond Laser-Induced Breakdown Spectroscopy (ps-LIBS) in the field of depth analysis. |
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| 700 | 1 | _ | |a Brezinsek, Sebastijan |0 P:(DE-Juel1)129976 |b 3 |
| 700 | 1 | _ | |a Rasinski, Marcin |0 P:(DE-Juel1)162160 |b 4 |
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| 700 | 1 | _ | |a Prakash Dhard, Chandra |0 P:(DE-HGF)0 |b 6 |
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| 773 | _ | _ | |a 10.1016/j.apsusc.2020.147185 |g Vol. 532, p. 147185 - |0 PERI:(DE-600)2002520-8 |p 147185 - |t Applied surface science |v 532 |y 2020 |x 0169-4332 |
| 856 | 4 | _ | |u https://juser.fz-juelich.de/record/891385/files/Postprint_Li_77.pdf |y Published on 2020-07-16. Available in OpenAccess from 2022-07-16. |
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