%0 Journal Article
%A Szyjka, Thomas
%A Baumgarten, Lutz
%A Mittmann, Terence
%A Matveyev, Yury
%A Schlueter, Christoph
%A Mikolajick, Thomas
%A Schroeder, Uwe
%A Müller, Martina
%T Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas
%J Physica status solidi / Rapid research letters
%V 15
%N 5
%@ 1862-6254
%C Weinheim
%I Wiley-VCH
%M FZJ-2021-06157
%P 2100027 -
%D 2021
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000629624800001
%R 10.1002/pssr.202100027
%U https://juser.fz-juelich.de/record/904587