Journal Article FZJ-2021-06157

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Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas

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2021
Wiley-VCH Weinheim

Physica status solidi / Rapid research letters 15(5), 2100027 - () [10.1002/pssr.202100027]

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Contributing Institute(s):
  1. Elektronische Eigenschaften (PGI-6)
Research Program(s):
  1. 1212 - Materials and Interfaces (POF4-121) (POF4-121)

Appears in the scientific report 2021
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Medline ; Creative Commons Attribution-NonCommercial-NoDerivs CC BY-NC-ND 4.0 ; OpenAccess ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; DEAL Wiley ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection
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 Record created 2021-12-28, last modified 2022-01-31


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