Home > Publications database > Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas |
Journal Article | FZJ-2021-06157 |
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2021
Wiley-VCH
Weinheim
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Please use a persistent id in citations: http://hdl.handle.net/2128/29831 doi:10.1002/pssr.202100027
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