TY  - JOUR
AU  - Szyjka, Thomas
AU  - Baumgarten, Lutz
AU  - Mittmann, Terence
AU  - Matveyev, Yury
AU  - Schlueter, Christoph
AU  - Mikolajick, Thomas
AU  - Schroeder, Uwe
AU  - Müller, Martina
TI  - Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas
JO  - Physica status solidi / Rapid research letters
VL  - 15
IS  - 5
SN  - 1862-6254
CY  - Weinheim
PB  - Wiley-VCH
M1  - FZJ-2021-06157
SP  - 2100027 -
PY  - 2021
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000629624800001
DO  - DOI:10.1002/pssr.202100027
UR  - https://juser.fz-juelich.de/record/904587
ER  -