%0 Journal Article
%A Volmer, Frank
%A Seidler, Inga
%A Bisswanger, Timo
%A Tu, Jhih-Sian
%A Schreiber, Lars
%A Stampfer, Christoph
%A Beschoten, Bernd
%T How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
%J Journal of physics / D
%V 54
%N 22
%@ 0022-3727
%C Bristol
%I IOP Publ.
%M FZJ-2022-00164
%P 225304 -
%D 2021
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000626867200001
%R 10.1088/1361-6463/abe89b
%U https://juser.fz-juelich.de/record/904840