Journal Article

FZJ-2022-00164

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation

Volmer, F. ; Seidler, I. ; Bisswanger, T. ; Tu, J.-S. ; Schreiber, L. (Corresponding author)FZJ* ; Stampfer, C.FZJ* ; Beschoten, B. (Corresponding author)FZJ*

2021
IOP Publ. Bristol

This record in other databases:    

Please use a persistent id in citations: http://hdl.handle.net/2128/29880  doi:10.1088/1361-6463/abe89b

---

Contributing Institute(s):

1. JARA Institut Quanteninformation (PGI-11)

Research Program(s):

1. 5221 - Advanced Solid-State Qubits and Qubit Systems (POF4-522) (POF4-522)

Appears in the scientific report 2021

---

Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; Nationallizenz ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

---