000904840 001__ 904840
000904840 005__ 20220131120438.0
000904840 0247_ $$2doi$$a10.1088/1361-6463/abe89b
000904840 0247_ $$2ISSN$$a0022-3727
000904840 0247_ $$2ISSN$$a0262-8171
000904840 0247_ $$2ISSN$$a0508-3443
000904840 0247_ $$2ISSN$$a1361-6463
000904840 0247_ $$2ISSN$$a2057-7656
000904840 0247_ $$2Handle$$a2128/29880
000904840 0247_ $$2altmetric$$aaltmetric:92331294
000904840 0247_ $$2WOS$$aWOS:000626867200001
000904840 037__ $$aFZJ-2022-00164
000904840 082__ $$a530
000904840 1001_ $$00000-0003-3526-2687$$aVolmer, Frank$$b0
000904840 245__ $$aHow to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
000904840 260__ $$aBristol$$bIOP Publ.$$c2021
000904840 3367_ $$2DRIVER$$aarticle
000904840 3367_ $$2DataCite$$aOutput Types/Journal article
000904840 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1641384537_15140
000904840 3367_ $$2BibTeX$$aARTICLE
000904840 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000904840 3367_ $$00$$2EndNote$$aJournal Article
000904840 536__ $$0G:(DE-HGF)POF4-5221$$a5221 - Advanced Solid-State Qubits and Qubit Systems (POF4-522)$$cPOF4-522$$fPOF IV$$x0
000904840 588__ $$aDataset connected to CrossRef, Journals: juser.fz-juelich.de
000904840 7001_ $$aSeidler, Inga$$b1
000904840 7001_ $$00000-0001-8147-4010$$aBisswanger, Timo$$b2
000904840 7001_ $$aTu, Jhih-Sian$$b3
000904840 7001_ $$0P:(DE-Juel1)172641$$aSchreiber, Lars$$b4$$eCorresponding author
000904840 7001_ $$0P:(DE-Juel1)180322$$aStampfer, Christoph$$b5
000904840 7001_ $$0P:(DE-Juel1)178028$$aBeschoten, Bernd$$b6$$eCorresponding author
000904840 773__ $$0PERI:(DE-600)1472948-9$$a10.1088/1361-6463/abe89b$$gVol. 54, no. 22, p. 225304 -$$n22$$p225304 -$$tJournal of physics / D$$v54$$x0022-3727$$y2021
000904840 8564_ $$uhttps://juser.fz-juelich.de/record/904840/files/Volmer_2021_J._Phys._D%20_Appl._Phys._54_225304.pdf$$yOpenAccess
000904840 909CO $$ooai:juser.fz-juelich.de:904840$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire
000904840 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)172641$$aForschungszentrum Jülich$$b4$$kFZJ
000904840 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)180322$$aForschungszentrum Jülich$$b5$$kFZJ
000904840 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)178028$$aForschungszentrum Jülich$$b6$$kFZJ
000904840 9131_ $$0G:(DE-HGF)POF4-522$$1G:(DE-HGF)POF4-520$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5221$$aDE-HGF$$bKey Technologies$$lNatural, Artificial and Cognitive Information Processing$$vQuantum Computing$$x0
000904840 9141_ $$y2021
000904840 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)1230$$2StatID$$aDBCoverage$$bCurrent Contents - Electronics and Telecommunications Collection$$d2021-01-29
000904840 915__ $$0LIC:(DE-HGF)CCBY4$$2HGFVOC$$aCreative Commons Attribution CC BY 4.0
000904840 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0113$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
000904840 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bJ PHYS D APPL PHYS : 2019$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0430$$2StatID$$aNational-Konsortium$$d2021-01-29$$wger
000904840 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2021-01-29
000904840 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz$$d2021-01-29$$wger
000904840 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2021-01-29
000904840 920__ $$lyes
000904840 9201_ $$0I:(DE-Juel1)PGI-11-20170113$$kPGI-11$$lJARA Institut Quanteninformation$$x0
000904840 9801_ $$aFullTexts
000904840 980__ $$ajournal
000904840 980__ $$aVDB
000904840 980__ $$aUNRESTRICTED
000904840 980__ $$aI:(DE-Juel1)PGI-11-20170113