TY  - JOUR
AU  - Volmer, Frank
AU  - Seidler, Inga
AU  - Bisswanger, Timo
AU  - Tu, Jhih-Sian
AU  - Schreiber, Lars
AU  - Stampfer, Christoph
AU  - Beschoten, Bernd
TI  - How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
JO  - Journal of physics / D
VL  - 54
IS  - 22
SN  - 0022-3727
CY  - Bristol
PB  - IOP Publ.
M1  - FZJ-2022-00164
SP  - 225304 -
PY  - 2021
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000626867200001
DO  - DOI:10.1088/1361-6463/abe89b
UR  - https://juser.fz-juelich.de/record/904840
ER  -